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SURFACE ENGINEERING RESEARCH CENTER
 
 

 
 
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facilities
 
 
高功率脈衝磁控濺鍍系統 (High Power Impulse Magnetron Sputtering System)
hipimshipims
 
陰極電弧沉積系統 (Cathodic Arc Deposition System)
arcarc
 
磁控濺鍍系統 (Unbalanced Magnetron Sputtering Systems)
sputtersputter
氦氣側漏儀 (Helium Leak Detector)
 
超音波清洗線系統 (Industrial Supersonic Cleaning System)
 
金屬電漿源離子植入系統 (Metal Ion Implantation System)
ion
電漿分析光譜儀 ( Plasma Analysis Instrument Optical Emission Spectrometer)
oes
高解析X光繞射儀 (XRD -- High Resolution X-ray Diffractometer)
xrd
場發射掃描式電子顯微鏡 (FESEM -- High Resolution Field Emission Scanning Microscope)
sem
 
 
 
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